AFM images of Al₂O₃/Gr after ALD cycles, each cycle with pre-H₂O

AFM images of the Al2O3 films (60 cycles) deposited on graphene flakes

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Schematic illustration of the ALD process for depositing Al2O3 using

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AFM morphology of Al2O3 thin films grown by ALD at 150 °C (a) and 300

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AFM images of 500 cycles Al 2 O 3 film. (a) As deposited and annealed

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